Microfabrication in
Biology and Medicine

1. Introduction

2. Methods of Fabrication
2.1. Overview on Methods
2.2. Materials
2.3. Photolithography
2.4. Thin Film Growth
2.5. Etching
2.6. Bonding
2.7. Deposition of Biomolecules
2.8. LIGA

3. Microengineering
3.1. Benefits of Miniaturization
3.2. Applications in Biology and Medicine

4. Case Study: Medical micro-TAS
4.1. Structure
4.2. Transportation system
4.3. Analysis

5. Conclusions

References